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US 12,754,454 B2Granted
Single photon source device and method of manufacturing the same
AssigneeBright Quantum Inc.
InventorsDonghan Lee, Daehyun Ahn, Yudong Jang
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Abstract
A single photon source device is proposed. The device may include a reflection layer, an insulating layer disposed on the reflection layer, and a single emitter configured to emit a single photon. The device may also include a first solid immersion lens portion disposed on the insulating layer to surround the single emitter, and a second solid immersion lens portion disposed on the insulating layer to surround the first solid immersion lens portion.
Claims20
A single photon source device comprising:
- a reflection layer;
- an insulating layer disposed on the reflection layer;
- a single emitter configured to emit a single photon;
- a first solid immersion lens portion disposed on the insulating layer to surround the single emitter;
- and
- a second solid immersion lens portion disposed on the insulating layer to surround the first solid immersion lens portion.
3 more elements
A method of manufacturing a single photon source device, comprising:
- forming a quantum dot containing epitaxial layer in which a quantum dot is located;
- processing the quantum dot containing epitaxial layer in which an insulating layer and a reflection layer are sequentially stacked on the quantum dot containing epitaxial layer, wherein except for a portion of the quantum dot containing epitaxial layer where the quantum dot is located, the insulating layer, and the reflection layer, the other portion of the quantum dot containing epitaxial layer are removed;
- forming a first solid immersion lens portion surrounding the quantum dot on the insulating layer using the portion of the quantum dot containing epitaxial layer where the quantum dot is located;
- and
- forming a second solid immersion lens portion surrounding the first solid immersion lens portion on the insulating layer.
2 more elements
Dependencies are inferred from the claim text.