Edge coupler and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-Tse Tang, Chewn-Pu Jou
Life of this patent
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Abstract
A method includes: receiving a substrate; and forming an edge coupler on the substrate, the edge coupler configured to receive light. The forming includes: depositing a first edge coupling member extending in a first direction in a first layer over the substrate; and depositing a second edge coupling member extending in the first direction in a second layer over the first layer. Each of the first and second edge coupling members has a width measured in a second direction monotonically non-decreasing in the first direction. One of the first and second edge coupling members includes a portion in a concave shape and the other includes a portion in a convex shape.
Claims20
A method, comprising:
- receiving a substrate;
- and
- forming a composite edge coupler on the substrate, the composite edge coupler configured to receive light, and the forming comprising:
- depositing a first edge coupler, extending in a first direction in which the light propagates and allowing the light to pass through, in a first layer over the substrate;
- and
- depositing a second edge coupler, extending in the first direction and allowing the light to pass through, in a second layer over the first layer,
- wherein each of the first and second edge couplers has a width measured in a second direction perpendicular to the first direction, wherein the width progressively increases from a first end configured to receive the light to a second end opposite the first end of each of the first and second edge couplers,
- wherein one of the first or second edge couplers comprises a concave shape, the concave shape curving inward toward a center point of optical signal propagation and extending from the first end to the second end, and the other comprises a convex shape, the convex shape curving outward from the center point and extending from the first end to the second end.
A method, comprising:
- receiving a substrate;
- and
- forming a composite edge coupler on the substrate, the composite edge coupler configured to receive light, and the forming comprising:
- depositing a first edge coupler extending in a first direction, in which the light propagates, in a first layer over the substrate;
- and
- depositing a second edge coupler extending in the first direction in a second layer over the first layer,
- wherein one of the first or second edge coupling members couplers is in a concave shape, the concave shape curving inward toward a center point of optical signal propagation and extending from a first end of the first or second edge coupler configured to receive light to a second end opposite to the first end, and the other is in a convex shape, the convex shape curving outward from the center point and extending from the first end to the second end.
A method, comprising:
- receiving a substrate;
- and
- forming a composite edge coupler on the substrate, the composite edge coupler configured to receive light, and the forming comprising:
- depositing a first edge coupler in a first layer, the first edge coupler having a first width progressively increasing along a first direction in which the light propagates;
- and
- depositing a second edge coupler in a second layer over the first layer, the second edge coupler having a second width progressively increasing along the first direction,
- wherein the first edge coupler is in a convex shape, the convex shape curving outward from a center point of optical signal propagation and extending from a first end of the first or second edge coupler configured to receive light to a second end opposite to the first end, and the second edge coupler is in a concave shape, the concave shape curving inward toward the center point and extending from the first end to the second end.
Dependencies are inferred from the claim text.