Magnetic sensor assembly
AssigneeApplied Materials, Inc.
InventorsClemens Pihan, Sven Langhoff
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsClemens Pihan, Sven Langhoff
Estimating the term…
A magnetic sensor includes a sensor housing, a magnet, a printed circuit board assembly, a first sensor element, and a second sensor element. The sensor housing includes a pocket and a magnet opening. The magnet is disposed in the magnet opening. The printed circuit board assembly is disposed in the pocket. The printed circuit board assembly includes a first portion and a second portion. The first sensor element and the second sensor element are disposed on the second portion. The first sensor element and second sensor element are configured to measure magnetic flux density, and the magnetic flux generated by the magnet is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.
A magnetic sensor, comprising:
A magnetic sensor, comprising:
An assembly for a substrate station, comprising:
Dependencies are inferred from the claim text.