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US 12,754,205 B2Granted
Inertial sensor and inertial measurement apparatus
AssigneeSeiko Epson Corporation
InventorTomonaga Kobayashi
Life of this patent
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Abstract
An inertial sensor includes a support substrate as a substrate, a lid provided to face the support substrate, a movable frame provided between the support substrate and the lid, a first comb-teeth movable electrode and/or a second comb-teeth movable electrode as a comb-teeth movable electrode provided in the movable frame, and a protrusion provided at least one of the support substrate or the lid and overlapping a tip end or a base part of the first comb-teeth movable electrode and/or the second comb-teeth movable electrode in a plan view.
Claims10
An inertial sensor comprising:
- a substrate;
- a lid provided to face the substrate;
- a movable frame provided between the substrate and the lid;
- a fixed frame provided between the substrate and the lid;
- a comb-teeth movable electrode provided in the movable frame;
- a comb-teeth fixed electrode provided in the fixed frame;
- and
- a protrusion provided on at least one of the substrate or the lid and overlapping from a base part to a tip end of the comb-teeth movable electrode in a plan view, and
- the protrusion overlaps from a base part to a tip end of the comb-teeth fixed electrode in the plan view.
6 more elements
Dependencies are inferred from the claim text.