Biosensor based on metal oxide thin film transistor and manufacturing method for the same

Abstract

Provided is a semiconductor-based DNA sensor which includes: a first electrode and a second electrode disposed on a substrate to be spaced apart from each other; a channel layer disposed between the first electrode and the second electrode; a target coupling layer disposed on the channel layer, and including probe DNA detecting target DNA through a hybridization reaction; a passivation layer selectively exposing an upper portion of the target coupling layer; and a gate layer disposed at a lower portion and/or an upper portion of the substrate, or an upper portion of the target coupling layer, in which the channel layer includes a metal oxide and a carbon nano tube.

Dependencies are inferred from the claim text.