Optical displacement meter

An optical displacement meter comprising:

• a light projecting and receiving module including a light projecting unit that applies slit light extending in an X direction, a light collecting unit that has a light receiving lens which collects reflected light reflected by a workpiece, a capturing unit that receives the light collected by the light collecting unit, and a support member which integrally holds the light projecting unit, the light collecting unit, and the capturing unit to have a Scheimpflug relationship in which a light receiving surface of the capturing unit is inclined with respect to an optical axis of the light receiving lens;
• a motor that integrally rotates the light projecting and receiving module;
• a housing that stores the light projecting and receiving module;
• and
• a control unit that controls the motor, and rotates the light projecting and receiving module in a state where the Scheimpflug relationship is maintained inside the housing to scan the slit light in a direction orthogonal to the X direction,
• wherein
• the light projecting unit has a light source and a light source housing that stores the light source,
• the light collecting unit further has a lens housing that stores the light receiving lens, the light projecting unit and the light collecting unit of the light projecting and receiving module are provided at intervals in a radial direction of a rotation shaft of the light projecting and receiving module, and a volume of the light source housing is smaller than a volume of the lens housing, and
• the light source housing is made of a maternal having a higher density than the lens housing to suppress a deviation between a gravity center position and the rotation shaft of the light projecting and receiving module caused by a difference in weight between the light projecting unit and the light collecting unit on a YZ plane orthogonal to the X direction.

An optical displacement meter comprising:

• a light projecting and receiving module including a light projecting unit that applies slit light extending in an X direction, a light collecting unit that has a light receiving lens which collects reflected light reflected by a workpiece, a capturing unit that receives the light collected by the light collecting unit, and a support member which integrally holds the light projecting unit, the light collecting unit, and the capturing unit to have a Scheimpflug relationship in which a light receiving surface of the capturing unit is inclined with respect to an optical axis of the light receiving lens;
• a motor that integrally rotates the light projecting and receiving module;
• a housing that stores the light projecting and receiving module;
• and
• a control unit that controls the motor, and rotates the light projecting and receiving module in a state where the Scheimpflug relationship is maintained inside the housing to scan the slit light in a direction orthogonal to the X direction, wherein
• as viewed along a rotation shaft, the rotation shaft of the light projecting and receiving module is disposed at a position overlapping with the light collecting unit.