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US 12,753,510 B2Granted
Calorimetry method to measure chemical reaction heat in ALD/ALE processes using temperature-sensitive resistance coatings
AssigneeUchicago Argonne, LLC
InventorsAnil U. Mane, Jeffrey W. Elam
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Abstract
A calorimetry sensor having a porous substrate and a temperature sensitive resistive coating. The calorimetry sensor has a known temperature coefficient of resistance. A process utilizes the known temperature coefficient of resistance and monitors changes in resistance of the calorimetry sensor to determine changes in temperature (heat) within an environment, such as during reactions within an ALD reactor.
Claims6
A calorimetry process comprising:
- monitoring the resistance of a calorimetry sensor comprising a resistive porous substrate having a porous substrate and a temperature sensitive resistive conformal coating deposited on the porous substrate, and a resistance circuit that includes the temperature sensitive resistive conformal coating;
- measuring a first change in resistance of the resistive porous substrate using the resistance circuit;
- and
- determining a change in heat based upon the first change in resistance and a known thermal coefficient of resistance for the resistive porous substrate.
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Dependencies are inferred from the claim text.