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US 12,753,124 B2Granted
Ceramic, probe guiding member, probe card and socket for package inspection
AssigneeFerrotec Material Technologies Corporation
InventorsWataru Yamagishi, Kazumasa Mori, Shunichi Eto
Life of this patent
Estimating the term…
Abstract
A ceramic containing, in mass %: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less, at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency. Fn=(SiC+3AlN)/(Si3N4+ZrO2) (1)
Claims18
A ceramic containing, in mass %:
- Si3N4:
- 20.0 to 60.0%,
- ZrO2:
- 25.0 to 70.0%,
- at least one selected from SiC and AlN:
- 2.0 to 17.0%, where AlN is 10.0% or less,
- at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5:
- 5.0 to 15.0%, wherein
- at least one selected from MgO, Y2O3, CeO2, CaO and HfO2, and
- at least one selected from TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5, and wherein
- Fn calculated from the following equation (1) satisfies 0.02 to 0.40,
- Fn=(SiC+3AlN)/(Si3N4+ZrO2) (1).
9 more elements
A ceramic containing, in mass %:
- Si3N4:
- 20.0 to 60.0%,
- ZrO2:
- 25.0 to 70.0%,
- at least one selected from SiC and AlN:
- 2.0 to 17.0%, where AlN is 10.0% or less,
- at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5:
- 5.0 to 15.0%,
- a crystal phase of ZrO2 is one of a crystal phase being a tetragonal crystal, a crystal phase being a tetragonal crystal and a monoclinic crystal, a crystal phase being a cubic crystal, a crystal phase being a cubic crystal and a tetragonal crystal, and a crystal phase being a cubic crystal and a monoclinic crystal, wherein
- Fn calculated from the following equation (1) satisfies 0.02 to 0.40,
- Fn=(SiC+3AlN)/(Si3N4+ZrO2) (1).
8 more elements
Dependencies are inferred from the claim text.