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AssigneeDisco Corporation
InventorsNorihisa Arifuku, Koshiro Suzuki, Yukihiro Kiribayashi, Masamitsu Kimura
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A forming method of a water-soluble protective film on a front surface of a plate-shaped object includes a water-soluble sheet arrangement step of arranging a water-soluble resin sheet having thermoplasticity on a side of the front surface of the plate-shaped object, and an integration step of heating the water-soluble resin sheet to melt or soften the same, and integrating the water-soluble resin sheet and the plate-shaped object, to form the water-soluble protective film on the plate-shaped object. Preferably, the water-soluble resin sheet may contain a light absorber. A processing method of a plate-shaped object includes the water-soluble sheet arrangement step and integration step.
A forming method of a water-soluble protective film on a front surface of a plate-shaped object, the forming method comprising:
A processing method of a plate-shaped object, comprising:
Dependencies are inferred from the claim text.