Substrate gripper and method for moving a substrate using the same

A substrate gripper for moving a glass or ceramic substrate, the substrate gripper comprising:

• a frame;
• a plurality of pad holes connected to the frame;
• and
• a plurality of suction pads disposed on the frame and connected to the pad holes,
• wherein the suction pad has a contact surface which comes into contact with one surface of a target substrate when the target substrate is mounted,
• the suction pad comprises:
• a first suction pad having a first suction pad contact surface at a first height in a state of not supporting the target substrate;
• and
• a second suction pad having a second suction pad contact surface at a second height in a state of not supporting the target substrate,
• the first height is greater than the second height based on the frame,
• a horizontal gripping force of the second suction pad is greater than a horizontal gripping force of the first suction pad,
• the second suction pad comprises a flat-type vacuum pad,
• the first suction pad comprises a bellows-type vacuum pad,
• a horizontal gripping force of the substrate gripper with respect to the target substrate relative to the number of suction pads comprised in the substrate gripper is 0.1 N/one suction pad or more,
• the frame comprises a first coupling portion, and a protruding finger which is detachably coupled to the first coupling portion and protrudes outward of the frame based on a center of the frame,
• the frame comprises a second coupling portion, and a recessed finger which is detachably coupled to the second coupling portion and is recessed inward of the frame based on the center of the frame,
• the first suction pad is disposed on the protruding finger,
• the second suction pad is disposed on the recessed finger, and
• the first suction pad comprising the bellows-type vacuum pad is disposed further away from the center of the frame than the second suction pad comprising the flat-type vacuum pad.