Grinding apparatus and grinding method
AssigneeDisco Corporation
InventorTakashi Yamaguchi
Life of this patent
Estimating the term…
Abstract
Provided is a grinding apparatus including a holding unit that holds a workpiece by a chuck table, a grinding unit, a transporting mechanism that has a holding part capable of holding the workpiece, a first table that holds the workpiece to be loaded onto the holding unit, a second table that holds the workpiece having been unloaded from the holding unit, and a controller. When the controller determines that replacement of a grinding wheel is necessary in a state in which all of the holding unit, the first table, and the second table are holding workpieces, the controller makes the holding part of the transporting mechanism hold the workpiece held by the holding unit.
Claims12
A grinding apparatus for sequentially grinding a plurality of workpieces, the grinding apparatus comprising:
- a holding unit that has a chuck table and holds a workpiece by the chuck table;
- a grinding unit that has a spindle fitted with a grinding wheel and grinds, by the grinding wheel, the workpiece held by the holding unit;
- a transporting mechanism that has a holding part capable of holding the workpiece, and loads the workpiece onto the holding unit and unloads the workpiece from the holding unit;
- a first table that holds the workpiece to be loaded onto the holding unit;
- a second table that holds the workpiece having been unloaded from the holding unit;
- and
- a controller that includes a processing device and a storage device and is capable of controlling an operation of the transporting mechanism according to a program stored in the storage device;
- the controller making a transition to a state in which replacement of the grinding wheel is to be made, by performing, according to the program,
- a step of determining whether or not the replacement of the grinding wheel fitted to the grinding unit is necessary in a state in which the holding unit is holding a second workpiece, the second table is holding a first workpiece, and the first table is holding a third workpiece, and
- a step of making the holding part of the transporting mechanism hold the second workpiece held by the holding unit, when it is determined that the replacement of the grinding wheel is necessary in the step of determining whether or not the replacement of the grinding wheel is necessary.
A grinding method for sequentially grinding a plurality of workpieces by using a grinding apparatus, the grinding apparatus including a holding unit that has a chuck table and holds a workpiece by the chuck table, a grinding unit that has a spindle fitted with a grinding wheel and grinds, by the grinding wheel, the workpiece held by the holding unit, a transporting mechanism that has a holding part capable of holding the workpiece, and loads the workpiece onto the holding unit and unloads the workpiece from the holding unit, a first table that holds the workpiece to be loaded onto the holding unit, and a second table that holds the workpiece having been unloaded from the holding unit, the grinding method comprising:
- a step of grinding, by the grinding wheel, a first workpiece held by the holding unit;
- a step of, after the first workpiece is ground by the grinding wheel, transporting the first workpiece held by the holding unit to the second table by the transporting mechanism, transporting a second workpiece held on the first table to the holding unit by the transporting mechanism, and transporting a third workpiece to the first table by the transporting mechanism;
- a step of determining whether or not replacement of the grinding wheel fitted to the grinding unit is necessary in a state in which the holding unit is holding the second workpiece, the second table is holding the first workpiece, and the first table is holding the third workpiece;
- and
- a step of making the holding part of the transporting mechanism hold the second workpiece held by the holding unit, when it is determined that the replacement of the grinding wheel of the grinding unit is necessary in the step of determining whether or not the replacement of the grinding wheel is necessary.
Dependencies are inferred from the claim text.