Processing apparatus
AssigneeDisco Corporation
InventorTakashi Okamura
Life of this patent
Estimating the term…
Abstract
A processing apparatus that processes a workpiece includes a chuck table that holds the workpiece including multiple streets that intersect each other on a holding surface, a processing unit that processes the workpiece held by the chuck table along a corresponding one of the streets, and a controller. When processing is suspended with an unprocessed region left while the processing unit is caused to process the workpiece from one end to the other end of the street, the controller rotates the chuck table by 180 degrees and causes the processing unit to process the unprocessed region of the workpiece from the other end of the street.
Claims6
A processing apparatus that processes a workpiece, the processing apparatus comprising:
- a chuck table having a holding surface that holds the workpiece, wherein the workpiece includes a plurality of streets that intersect each other;
- a processing unit that processes the workpiece held by the chuck table along a corresponding one of the streets;
- a processing feed unit that moves the chuck table and the processing unit relative to each other in a direction parallel to the holding surface along a processing feed direction;
- a rotation unit capable of rotating the chuck table around a rotation axis along a direction perpendicular to the holding surface;
- and
- a controller that controls the chuck table, the processing unit, the processing feed unit, and the rotation unit, wherein the controller is configured to:
- sense an abnormality in at least one street of the plurality of streets while the processing unit is processing the workpiece from one end to an opposing other end of the at least one street;
- suspend the processing of the workpiece by the processing unit leaving an unprocessed region between a position of the abnormality and the other end of the at least one street;
- rotate the chuck table by 180 degrees using the rotation unit;
- and
- cause the processing unit to process the unprocessed region of the at least one street on the workpiece from the other end of the at least one street while moving the chuck table and the processing unit relative to each other along the processing feed direction by the processing feed unit such that the processing unit does not process the position of the abnormality.
Dependencies are inferred from the claim text.