Laser beam irradiation apparatus
AssigneeDisco Corporation
InventorsTeppei Nomura, Zhiwen Chen
Life of this patent
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Abstract
A laser beam irradiation unit of a laser beam irradiation apparatus includes a laser beam source that emits a laser beam and a spatial light modulator that modulates the laser beam emitted from the laser beam source, according to a phase pattern, and that emits the laser beam. A controller has a storing section that stores the phase pattern to be displayed in the spatial light modulator and a rotation instructing section that rotates the phase pattern stored in the storing section. The controller uniformizes the power density of the laser beam with which a plate-shaped workpiece is irradiated, by rotating the phase pattern while the plate-shaped workpiece is irradiated with the laser beam.
Claims4
A laser beam irradiation apparatus comprising:
- a holding table that holds a plate-shaped workpiece;
- a laser beam irradiation unit that irradiates the plate-shaped workpiece held by the holding table with a laser beam;
- and
- a controller that controls the laser beam irradiation unit,
- wherein the laser beam irradiation unit includes
- a laser beam source that emits the laser beam, and
- a spatial light modulator that modulates the laser beam emitted from the laser beam source, according to a predetermined phase pattern, and emits the modulated laser beam,
- the controller has
- a storing section that stores the predetermined phase pattern to be displayed in the spatial light modulator, and
- a rotation instructing section that rotates the predetermined phase pattern stored in the storing section, and
- wherein the controller uniformizes a power density of the laser beam with which the plate-shaped workpiece is irradiated, by rotating the predetermined phase pattern by a predetermined angle while the plate-shaped workpiece is irradiated with the laser beam.
Dependencies are inferred from the claim text.