Forming method of linear pattern including solid particles and transfer plate
AssigneeCanon Kabushiki Kaisha
InventorsHirokazu Usami, Kenta Kubo, Hiroshi Taniuchi
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AssigneeCanon Kabushiki Kaisha
InventorsHirokazu Usami, Kenta Kubo, Hiroshi Taniuchi
Estimating the term…
A forming method of a linear pattern, includes bringing a transfer plate including a raised portion extending in a predetermined direction and a material to be transferred containing solid particles into contact with each other and causing the raised portion to hold the solid particles, pressing the raised portion against a base material, and separating the raised portion from the base material, wherein the raised portion has distribution of holding power to hold the material to be transferred in a width direction orthogonal to the predetermined direction in a manner that a region with higher holding power is interposed between regions with lower holding power, and has a portion with an elastic modulus that is lower than an elastic modulus of the solid particles.
A forming method of a linear pattern, comprising:
A transfer plate to transfer a linear pattern including a plurality of solid particles to a base material, the transfer plate comprising
Dependencies are inferred from the claim text.