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US 12,752,296 B2Granted
Substrate processing device and control method for substrate processing device
AssigneeSemes Co., Ltd.
InventorsSang Min Ha, Hyeong Jun Cho, Jae Hong Kim, Sang Hyun Son, Young-Joo Seo
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Abstract
The present invention provides a substrate processing device. An aspect of the present disclosure is to a substrate processing device and a control method for substrate processing device which can improve a resolution of a printer by determining a discharge time of an ink discharge controller with a higher resolution than a pulse wave generated by an encoder.
Claims10
A substrate processing device, comprising:
- a substrate transfer portion in which a transfer object is seated;
- and
- a jetting system unit including
- an ink jetting body configured to jet ink to the transfer object from an upper surface of the substrate transfer portion and print the transfer object,
- an ink module transfer portion configured to transfer the ink jetting body,
- an ink discharge controller configured to control an ink jetting timing of the ink jetting body by interlocking the ink jetting body,
- a speed measuring portion configured to specify a moving speed of the ink jetting body,
- a signal splitter configured to receive the moving speed of the ink jet jetting body by interlocking the speed measuring portion and transmit a predictive movement signal predicted according to the moving speed to the ink discharge controller and
- an encoder disposed around the ink module transfer portion and configured to output a movement signal for each unit movement distance of the ink module transfer portion,
- wherein the signal splitter is configured to generate predictive pulse waves respectively based on an initial value of the movement signal output from the encoder and transmit the predictive pulse waves to the ink discharge controller.
7 more elements
A substrate processing device, comprising:
- a substrate transfer portion in which a transfer object is seated;
- and
- a jetting system unit including
- an ink jetting body configured to jet ink to the transfer object from an upper surface of the substrate transfer portion and print the transfer object,
- an ink module transfer portion configured to transfer the ink jetting body,
- an ink discharge controller configured to control an ink jetting timing of the ink jetting body by interlocking the ink jetting body,
- a speed measuring portion configured to specify a moving speed of the ink jetting body, and
- a signal splitter configured to receive the moving speed of the ink jet-jetting body by interlocking the speed measuring portion and transmit a predictive movement signal predicted according to the moving speed to the ink discharge controller,
- wherein the jetting system unit further includes an encoder disposed around the ink module transfer portion and configured to output a movement signal for each unit movement distance of the ink module transfer portion,
- the signal splitter is configured to generate predictive pulse waves respectively based on an initial value of the movement signal output from the encoder and transmits the predictive pulse waves to the ink discharge controller,
- the signal splitter is configured to uses a speed profile for a movement of the ink jetting body and a predictive pulse wave profile configured so as to generate the predictive pulse waves predicted according to the moving speed of the speed profile,
- the speed profile is divided into an equivalent acceleration section and an equivalent speed section, and in the equivalent speed section, the predictive pulse waves at same intervals are transmitted to the ink discharge controller,
- in the equivalent acceleration section, a respective one of the predictive pulse waves whose interval narrows in proportion to a slope of the equivalent acceleration section is transmitted to the ink discharge controller,
- a plurality of the ink jetting bodies and a plurality of the ink discharge controllers are interlocked and configured to jet the ink,
- the signal splitter is configured to outputs the predictive pulse waves to each of the plurality of ink discharge controllers,
- the ink discharge controller is configured to acquires position information of the ink jetting body by counting a number of inputs of a respective one of the predictive pulse waves,
- the ink module transfer portion includes
- a module base in which the ink jetting body is mounted,
- an actuator driver configured to transfer the module base in one direction, and
- an ink module position controller configured to control a jetting position of the ink by controlling the actuator driver to move the module base,
- the ink module position controller is configured to acquires the position information of the module base from the encoder by interlocking the encoder, and
- the substrate transfer portion further includes a base controller configured to transfer the transfer object according to a predetermined work command.
19 more elements
Dependencies are inferred from the claim text.