Microplasma device and method thereof
AssigneeNational Taiwan University of Science and Technology
InventorsRen-Jie Weng, Wei-Hung Chiang
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AssigneeNational Taiwan University of Science and Technology
InventorsRen-Jie Weng, Wei-Hung Chiang
Estimating the term…
The present invention provides a microplasma device and system thereof. The microplasma device comprises a reaction tank carrying with a reaction solution. A nanomaterial and its precursors are contained in the reaction solution. A first electrode is at least partially immersed in the reaction solution. A second electrode comprises a microplasma array component to eject microplasma array to the surface of the reaction solution. A power source is electrically connected between the first electrode and the second electrode. The present invention provides a novel microplasma array device to produce nanomaterial with increased yield rate. The microplasma array device can be multiplied by adding the outlet of the microplasma as desired to produce nanomaterial including but not limited to nano-metal particles, carbon quantum dots, silicon quantum dots and plasma-activated water with higher yield rate.
A microplasma device comprising:
Dependencies are inferred from the claim text.