Prevention of contamination of substrates during gas purging

A system comprising:

• a load port assembly comprising a purge apparatus to output a flow of gas through one or more nozzles;
• a factory interface coupled to at least one of a load lock chamber, a transfer chamber, or a processing chamber, wherein the factory interface is to operatively couple to a substrate carrier;
• and
• one or more controllers to:
• cause performance, via the one or more nozzles, of a plurality of gas purging sessions of an environment of a substrate carrier coupled to the one or more nozzles;
• and
• cause, responsive to one or more signals received by the one or more controllers and indicating that at least one gas purging session of the plurality of gas purging sessions is yet to be performed, coupling of the one or more nozzles to the substrate carrier to be maintained throughout the plurality of gas purging sessions.

A system comprising:

• a memory device;
• and
• one or more processing devices communicatively coupled to the memory device, to:
• cause performance, via one or more nozzles of a gas purge apparatus, of a plurality of gas purging sessions of an environment of a substrate carrier coupled to the one or more nozzles;
• and
• cause, responsive to one or more signals received by the one or more processing devices and indicating that at least one gas purging session of the plurality of gas purging sessions is yet to be performed, coupling of the one or more nozzles to the substrate carrier to be maintained throughout the plurality of gas purging sessions.