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US 12,751,236 B2Granted
Temperature control system with flammable heat transfer fluid
AssigneeApplied Materials, Inc.
InventorsRony David Mathew, Varun Kumar Chenna
Life of this patent
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Abstract
A system includes a closed loop configured to flow a heat transfer fluid to regulate temperature of a process tool. The heat transfer fluid includes a flammable or combustible fluid. The system further includes a temperature control unit configured to receive the heat transfer fluid and regulate temperature of the heat transfer fluid. The system further includes a plurality of sensor configured to measure one or more properties of the heat transfer fluid. The system further includes a controller configured to determine a fault in the closed loop based on sensor data received from the plurality of sensors and to further cause a corrective action responsive to determining the fault.
Claims20
A system comprising:
- a closed loop configured to flow a heat transfer fluid to regulate temperature of a process tool, wherein the heat transfer fluid comprises a flammable or combustible fluid;
- a temperature control unit configured to receive the heat transfer fluid and regulate temperature of the heat transfer fluid;
- a plurality of sensors configured to measure one or more properties of the heat transfer fluid, wherein one or more first sensors are configured to measure the one or more properties of the heat transfer fluid flowing along a first flow path from the temperature control unit to the process tool, and wherein one or more second sensors are configured to measure the one or more properties of the heat transfer fluid flowing along a second flow path from the process tool to the temperature control unit;
- and
- a controller configured to determine a fault in the closed loop based on a mismatch between first sensor data received from the one or more first sensors and second sensor data received from the one or more second sensors, the controller to further cause a corrective action responsive to determining the fault.
2 more elements
A method comprising:
- causing regulation of temperature of a process tool by a flow of heat transfer fluid to the process tool along a closed loop, wherein the heat transfer fluid comprises a flammable or combustible fluid;
- causing regulation of temperature the heat transfer fluid in a temperature control unit configured to receive the heat transfer fluid from the process tool;
- receiving first sensor data indicative of one or more measured properties of the heat transfer fluid flowing along a first flow path from the temperature control unit to the process tool;
- receiving second sensor data indicative of the one or more measured properties of the heat transfer fluid flowing along a second flow path from the process tool to the temperature control unit;
- determining a fault in the closed loop based on a mismatch between the first sensor data and the second sensor data;
- and
- causing a corrective action responsive to determining the fault.
4 more elements
A system comprising:
- a temperature control unit;
- a process tool;
- a closed loop to flow a heat transfer fluid between the temperature control unit and the process tool, wherein the heat transfer fluid comprises a flammable or combustible fluid;
- a plurality of sensors configured to measure one or more properties of the heat transfer fluid, wherein one or more first sensors are configured to measure the one or more properties of the heat transfer fluid flowing along a first flow path from the temperature control unit to the process tool, and wherein one or more second sensors are configured to measure the one or more properties of the heat transfer fluid flowing along a second flow path from the process tool to the temperature control unit;
- and
- a controller, wherein the controller is configured to:
- cause the heat transfer fluid to flow along the closed loop to regulate temperature of the process tool;
- cause the temperature control unit to regulate temperature of the heat transfer fluid;
- receive first sensor data from the one or more first sensors indicative of the one or more properties of the heat transfer fluid flowing along the first flow path;
- receive second sensor data from the one or more second sensors indicative of the one or more properties of the heat transfer fluid flowing along the second flow path;
- determine a fault in the closed loop based on a mismatch between the first sensor data and the second sensor data;
- and
- cause a corrective action responsive to determining the fault.
10 more elements
Dependencies are inferred from the claim text.