Semiconductor transport system and method of transporting semiconductor

A method of transporting a semiconductor, the method comprising:

• providing an accommodation container accommodating a wafer and including nitrogen gas to a packaging chamber of a first semiconductor transport system;
• performing, in the packaging chamber, a first packaging on the accommodation container by packaging the accommodation container with vinyl;
• performing a second packaging on the accommodation container, on which the first packaging has been performed, by packaging the accommodation container with a logistics bag;
• transporting the accommodation container, on which the first packaging and the second packaging have been performed, to a standby chamber of the first semiconductor transport system, and standing by the accommodation container in the standby chamber;
• transporting the accommodation container that was in standby in the standby chamber to a second semiconductor transport system by using a transporter in a transport chamber of the first semiconductor transport system;
• and
• removing the first packaging and the second packaging in a packaging chamber of the second semiconductor transport system,
• wherein an internal temperature of the standby chamber, in which the accommodation container is in standby, of the first semiconductor transport system, is maintained in a range of 18° C. to 23.5° C., and internal humidity of the standby chamber of the first semiconductor transport system is maintained in a range of 0% to 45%.