Transducers including laser etched substrates

A method of manufacturing a transducer, comprising:

• forming a support structure from a transparent material, the support structure configured to support a sensing element and deform in response to an environmental parameter, wherein forming the support structure includes modifying a first portion of the transparent material by exposing the first portion to laser radiation, and removing the first portion by an etching process, the support structure including:
• a cavity bounded by a first cavity surface, a second cavity surface opposing the first cavity surface, a first cavity end and a second cavity end;
• a flexural element extending into the cavity from the first cavity end or the second cavity end;
• and
• a moveable mass supported within the cavity by the flexural element, wherein the moveable mass is moveable at least in a direction that extends from the first cavity surface to the second cavity surface;
• and
• disposing the sensing element at a fixed position relative to the support structure, the sensing element configured to generate a signal indicative of movement of the moveable mass within the cavity in response to the environmental parameter.