High-Q factor, multiferroic resonant magnetic field sensors and limits on strain modulated sensing performance

A method, comprising:

• applying a sinusoidal drive voltage across a piezoelectric portion of a magnetic field sensor component at a resonant frequency of a magnetostrictive material in the magnetic field sensor component, wherein the magnetic field sensor component comprises:
• the piezoelectric portion;
• a plate portion comprising (i) a drive electrode superposed over the piezoelectric portion and in mechanical communication with the piezoelectric portion, the drive electrode comprising a magnetostrictive material and (ii) a sense electrode superposed over the piezoelectric portion and in mechanical communication with the piezoelectric portion, the sense electrode comprising a magnetostrictive material;
• and
• a tether portion extending from the plate portion;
• inducing, via the applied sinusoidal drive voltage, a time-varying mechanical strain in the magnetostrictive material that upconverts a received magnetic field to a resonance band of the drive electrode;
• and
• converting the upconverted received magnetic field into an electric signal.