Substrate with a piezoelectric film and piezoelectric element
AssigneeFUJIFILM Corporation
InventorSeigo Nakamura
Life of this patent
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Abstract
There are provided a substrate with a piezoelectric film and a piezoelectric element, including on a substrate in the following order, a lower electrode layer and a piezoelectric film, in which in a case where B is denoted as a B site element in a perovskite-type structure, the piezoelectric film includes, a first region containing a perovskite-type oxide represented by General Formula (1), PbδBO3 (1), here 1≤δ≤1.5, and a second region consisting of the same elements as elements in the first region and containing an oxide represented by General Formula (2), PbαBO3 (2), here δ/3≤α<δ, and the second region is provided on an outermost layer of the piezoelectric film opposite to the lower electrode layer.
Claims8
A substrate with a piezoelectric film, comprising, on a substrate in the following order:
- a lower electrode layer;
- and
- a piezoelectric film;
- wherein in a case where B is denoted as a B site element in a perovskite-type structure, the piezoelectric film includes,
- a first region containing a perovskite-type oxide represented by General Formula (1),
- PbδBO3 (1)
- 1≤δ≤1.5, and
- a second region consisting of the same elements as elements in the first region and containing an oxide represented by General Formula (2),
- PbαBO3 (2)
- δ/3≤α<δ, and
- the second region is provided on an outermost layer of the piezoelectric film opposite to the lower electrode layer, and wherein in the second region, a compositional ratio α in General Formula (2) decreases monotonically from a first region side toward the outermost surface.
Dependencies are inferred from the claim text.