Piezoelectric element and actuator
AssigneeFUJIFILM Corporation
InventorsHiroyuki Kobayashi, Seigo Nakamura, Shinya Sugimoto, Tsutomu Sasaki
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AssigneeFUJIFILM Corporation
InventorsHiroyuki Kobayashi, Seigo Nakamura, Shinya Sugimoto, Tsutomu Sasaki
Estimating the term…
A piezoelectric element includes a substrate, a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode, in which both the first piezoelectric film and the second piezoelectric film have spontaneous polarizations aligned in a film thickness direction and directions of the spontaneous polarizations are the same, and in a case where in a hysteresis curve of one piezoelectric film, a coercive voltage Vcf+, a coercive voltage Vcf−, |Vcf+−Vcf−|=ΔVcf, and the larger of an absolute value of Vcf+ and an absolute value of Vcf− is denoted by Vcf, and in a hysteresis curve of the other piezoelectric film, a coercive voltage Vcr+, a coercive voltage Vcr−, |Vcr+−Vcr−|=ΔVcr, and the larger of an absolute value of Vcr+ and an absolute value Vcr− is denoted by Vcr, ΔVcr<ΔVcf−0.2 and Vcr<Vcf−0.2 are satisfied.
A piezoelectric element comprising:
Dependencies are inferred from the claim text.