Semiconductor device and a method for manufacturing the same
AssigneeMacronix International Co., Ltd.
InventorsYu-Yu Lin, Feng-Min Lee
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a resistor. The resistor includes two bottom electrodes adjacent to each other, a resistive layer, a top electrode and a conductive sidewall. The resistive layer is disposed on the two bottom electrodes. The top electrode is disposed on the resistive layer. The conductive sidewall surrounds the top electrode and is electrically connected to the top electrode and a bottom electrode of the two bottom electrodes. The top electrode overlaps the two bottom electrodes in the first direction, and extends above the two bottom electrodes along a second direction different from the first direction.
Claims14
A semiconductor device, comprising at least one resistor, wherein the at least one resistor comprises:
- two bottom electrodes adjacent to each other;
- a resistive layer disposed on the two bottom electrodes;
- a top electrode disposed on the resistive layer;
- and
- a conductive sidewall surrounding the top electrode and being electrically connected to the top electrode and one of the two bottom electrodes;
- wherein the top electrode overlaps the two bottom electrodes in a first direction, and extends above the two bottom electrodes along a second direction different from the first direction.
A method for manufacturing a semiconductor device, comprising forming at least one resistor, wherein forming steps of the at least one resistor comprises:
- forming two bottom electrodes adjacent to each other;
- forming a resistive layer disposed on the two bottom electrodes;
- forming a top electrode disposed on the resistive layer;
- and
- forming a conductive sidewall, wherein the conductive sidewall surrounds the top electrode and is electrically connected to the top electrode and one of the two bottom electrodes;
- wherein the top electrode overlaps the two bottom electrodes in a first direction, and extends above the two bottom electrodes along a second direction different from the first direction.
Dependencies are inferred from the claim text.