Image processing apparatus, inspection apparatus, review apparatus, image processing method, inspection method, and review method
AssigneeLasertec Corporation
InventorsTakeharu Hommyo, Ryuta Namise
Life of this patent
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AssigneeLasertec Corporation
InventorsTakeharu Hommyo, Ryuta Namise
Estimating the term…
An image processing apparatus according to the present embodiment includes an evaluation parameter acquisition unit configured to acquire an evaluation parameter for evaluating the information about each pixel of the plurality of pixels included in an evaluation image, based on comparison between a reference image and the evaluation image, the comparison being based on information about each pixel of a plurality of pixels included in the reference image and information about each pixel of a plurality of pixels included in the evaluation image corresponding to the reference image; a statistical value acquisition unit configured to acquire a statistical value of the evaluation parameters for a plurality of predetermined specific pixels in the evaluation image; and a standardized evaluation parameter acquisition unit configured to acquire a standardized evaluation parameter for evaluating the information about each pixel of the plurality of pixels included in the evaluation image.
An image processing apparatus comprising:
An image processing method comprising:
Dependencies are inferred from the claim text.