Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorKatsumi Suzuki
Life of this patent
Estimating the term…
Abstract
An acoustic wave device includes a support including support substrate and an intermediate layer on the support substrate, a piezoelectric layer on the intermediate layer, and an IDT electrode on the piezoelectric layer. A cavity portion is provided in the support. The piezoelectric layer includes a membrane portion overlapping the cavity portion in a plan view. At least a portion of the IDT electrode is in the membrane portion. A spacer layer is in the support and made of a material different from materials of the piezoelectric layer and the intermediate layer. The spacer layer is located in a portion other than the cavity portion.
Claims21
An acoustic wave device comprising:
- a support including a support substrate and an intermediate layer on the support substrate;
- a piezoelectric layer on the intermediate layer;
- and
- an excitation electrode on the piezoelectric layer;
- wherein
- a cavity portion is provided in the support;
- the piezoelectric layer includes a membrane portion overlapping the cavity portion in a plan view, the membrane portion including at least a portion of the excitation electrode;
- a spacer layer is in the support and made of a material different from materials of the piezoelectric layer and the intermediate layer;
- and
- the spacer layer is located in a portion other than the cavity portion.
Dependencies are inferred from the claim text.