Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya Kimura, Katsumi Suzuki
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AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya Kimura, Katsumi Suzuki
Estimating the term…
An acoustic wave device includes a support substrate having a thickness in a first direction, a piezoelectric layer on the support substrate, and an interdigital transducer electrode on the piezoelectric layer and including first and second electrode fingers extending in a second direction crossing the first direction. The second electrode fingers face the first electrode fingers in a third direction orthogonal or substantially orthogonal to the second direction. The support substrate and the piezoelectric layer include a hollow therebetween at a position at least partially overlapping the interdigital transducer electrode in the first direction. At least one through hole penetrates the piezoelectric layer at a position not overlapping the interdigital transducer electrode in the first direction, and the through hole communicates with the hollow. A reinforcing support extends inside the hollow in a region overlapping the hollow and not overlapping the first and second electrode fingers.
An acoustic wave device comprising:
An acoustic wave device comprising:
Dependencies are inferred from the claim text.