Apparatus and method for supplying power

A method for supplying power to a plurality of loads, the method comprising:

• a process of primarily matching impedance between a plurality of signal generation units and a plurality of loads by inputting each of variable frequency signals generated from a plurality of variable frequency oscillation units to each of the plurality of signal generation units and adjusting a frequency;
• a process of secondarily matching impedance between each of the plurality of signal generation units and each of the plurality of loads while changing the adjusted frequency to a reference frequency when the adjusted frequency is different from the reference frequency after primarily matching the impedance;
• and
• a process of generating a power signal input to the plurality of loads by distributing and inputting the reference frequency signal generated from a common reference frequency oscillation unit to the plurality of signal generation units,
• wherein the process of primarily matching the impedance and the process of the secondarily matching the impedance are performed by connecting the variable frequency oscillation unit to the plurality of signal generation units and releasing the connection between the reference frequency oscillation unit and the plurality of signal generation units so that the reference frequency signal is not input to the plurality of signal generation units, and
• the process of generating the power signal is performed by connecting the reference frequency oscillator unit to the plurality of generation units and releasing the connection between the variable frequency oscillator units and the plurality of signal generation units so that the variable frequency signal is not input to the plurality of generation units.