Semiconductor laser device
AssigneeNuvoton Technology Corporation Japan
InventorTohru Nishikawa
Life of this patent
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Abstract
A semiconductor laser device includes a submount, a semiconductor laser element, and a bonding material. The semiconductor laser element includes a substrate and a layered structure, and is disposed with the layered structure facing the submount. A waveguide extending in a first direction parallel to the main surface of the substrate is formed in the layered structure. The bonding material includes an inner region bonded to the semiconductor laser element and one outer region located outward of the inner region. The one outer region is spaced apart from one side surface of the semiconductor laser element. Width A of the semiconductor laser element and width B of the one outer region in a second direction perpendicular to the first direction and parallel to the main surface of the substrate satisfy B≥A/4.
Claims23
A semiconductor laser device comprising:
- a submount;
- a semiconductor laser element;
- and
- a bonding material that bonds the submount and the semiconductor laser element, wherein
- the semiconductor laser element includes a substrate and a layered structure laminated above a main surface of the substrate, and is disposed with the layered structure facing the submount,
- the layered structure includes a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer laminated in stated order on the substrate,
- a waveguide extending in a first direction parallel to the main surface of the substrate is formed in the layered structure,
- in a cross section perpendicular to the first direction, the bonding material includes:
- an inner region bonded to the semiconductor laser element;
- and
- among regions located outward of the inner region, one outer region located on a side of the inner region that corresponds to one side surface of the semiconductor laser element and an other outer region located on a side of the inner region that corresponds to an other side surface of the semiconductor laser element,
- the one outer region includes a region located outward of the one side surface,
- the other outer region includes a region located outward of the other side surface,
- the one outer region is spaced apart from a point on an end of the semiconductor laser element, the end being in a second direction, the point being located on a line extending in the second direction and passing through a point, on the layered structure, that is closest to the submount, the second direction being perpendicular to the first direction and parallel to the main surface of the substrate, and
- a width A of the semiconductor laser element, a width B of the one outer region, and a width C of the other outer region in the second direction satisfy B≥A/4 and C≥A/4.
A semiconductor laser device comprising:
- a submount;
- a semiconductor laser element;
- and
- a bonding material that bonds the submount and the semiconductor laser element, wherein
- the semiconductor laser element includes a substrate and a layered structure laminated above a main surface of the substrate, and is disposed with the layered structure facing the submount,
- the layered structure includes a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer laminated in stated order on the substrate,
- a waveguide extending in a first direction parallel to the main surface of the substrate is formed in the layered structure,
- in a cross section perpendicular to the first direction, the bonding material includes:
- an inner region bonded to the semiconductor laser element;
- and
- among regions located outward of the inner region, one outer region located on a side of the inner region that corresponds to one side surface of the semiconductor laser element and an other outer region located on a side of the inner region that corresponds to an other side surface of the semiconductor laser element,
- the one outer region includes a region located outward of the one side surface,
- the other outer region includes a region located outward of the other side surface,
- the one outer region is spaced apart from a point on an end of the semiconductor laser element, the end being in a second direction, the point being located on a line extending in the second direction and passing through a point, on the layered structure, that is closest to the submount the second direction being perpendicular to the first direction and parallel to the main surface of the substrate,
- at the one side surface, the semiconductor laser element includes a first stepped portion formed at an end portion closer to the submount, and at the other side surface, includes a second stepped portion formed at an end portion closer to the submount,
- the semiconductor laser element and the bonding material are spaced apart at the first stepped portion and the second stepped portion,
- a maximum thickness t13 of the bonding material in the one outer region and a distance t12 between the first stepped portion and a surface of the bonding material that faces the submount satisfy t13≤t12, and
- a maximum thickness t17 of the bonding material in the other outer region and a distance t16 between the second stepped portion and a surface of the bonding material that faces the submount satisfy t17≤t16.
A semiconductor laser device comprising:
- a submount;
- a semiconductor laser element;
- and
- a bonding material that bonds the submount and the semiconductor laser element, wherein
- the semiconductor laser element includes a substrate and a layered structure laminated above a main surface of the substrate, and is disposed with the layered structure facing the submount,
- the layered structure includes a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer laminated in stated order on the substrate,
- a waveguide extending in a first direction parallel to the main surface of the substrate is formed in the layered structure,
- in a cross section perpendicular to the first direction, the bonding material includes:
- an inner region bonded to the semiconductor laser element;
- and
- among regions located outward of the inner region, one outer region located on a side of the inner region that corresponds to one side surface of the semiconductor laser element and an other outer region located on a side of the inner region that corresponds to an other side surface of the semiconductor laser element,
- the one outer region includes a region located outward of the one side surface,
- the other outer region includes a region located outward of the other side surface,
- the one outer region is spaced apart from a point on an end of the semiconductor laser element, the end being in a second direction, the point being located on a line extending in the second direction and passing through a point, on the layered structure, that is closest to the submount, the second direction being perpendicular to the first direction and parallel to the main surface of the substrate,
- at the one side surface, the semiconductor laser element includes a first stepped portion formed at an end portion closer to the submount, and at the other side surface, includes a second stepped portion formed at an end portion closer to the submount,
- the semiconductor laser element and the bonding material are spaced apart at the first stepped portion and the second stepped portion,
- the bonding material in the inner region has a maximum thickness at a position closer to the other side surface than to the one side surface and a minimum thickness at a position closer to the one side surface than to the other side surface, and
- a maximum thickness t15 of the bonding material in the inner region, a minimum thickness t11 of the bonding material in the inner region, a thickness t14 of the bonding material at an outer edge portion of the one outer region, and a thickness t18 of the bonding material at an outer edge portion of the other outer region satisfy at least one of t11≥t14/1.5 or t15≥t18/1.5.
A semiconductor laser device comprising:
- a submount;
- a semiconductor laser element;
- and
- a bonding material that bonds the submount and the semiconductor laser element, wherein
- the semiconductor laser element includes a substrate and a layered structure laminated above a main surface of the substrate, and is disposed with the layered structure facing the submount,
- the layered structure includes a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer laminated in stated order on the substrate,
- a waveguide extending in a first direction parallel to the main surface of the substrate is formed in the layered structure,
- in a cross section perpendicular to the first direction, the bonding material includes:
- an inner region bonded to the semiconductor laser element;
- and
- among regions located outward of the inner region, one outer region located on a side of the inner region that corresponds to one side surface of the semiconductor laser element and an other outer region located on a side of the inner region that corresponds to an other side surface of the semiconductor laser element,
- the one outer region includes a region located outward of the one side surface,
- the other outer region includes a region located outward of the other side surface,
- the one outer region is spaced apart from a point on an end of the semiconductor laser element, the end being in a second direction, the point being located on a line extending in the second direction and passing through a point, on the layered structure, that is closest to the submount, the second direction being perpendicular to the first direction and parallel to the main surface of the substrate,
- the semiconductor laser element includes a front end surface that emits laser light in the first direction and a rear end surface on an opposite side relative to the front end surface,
- the front end surface is located outward of the submount from an outer edge portion of the submount in the first direction,
- the rear end surface is located inward of the submount from the outer edge portion of the submount in the first direction,
- the bonding material is present between the rear end surface and the outer edge portion of the submount, and
- the bonding material is spaced apart from the rear end surface.
Dependencies are inferred from the claim text.