Waveguide device operable up to terahertz frequencies including a line substrate having periodic holes formed therein and which is mounted on a support substrate

Abstract

A waveguide device includes: a line substrate having holes periodically formed in a semiconductor substrate; a waveguide configured to propagate an electromagnetic wave while confining the electromagnetic wave therein with the holes; a low-dielectric constant portion having a dielectric constant smaller than a dielectric constant of the line substrate, the low-dielectric constant portion overlapping the waveguide in a thickness direction of the line substrate; and a support substrate arranged below the line substrate, the support substrate being configured to support the line substrate. The waveguide device is configured to guide an electromagnetic wave having a frequency of 30 GHz or more and 20 THz or less.

Dependencies are inferred from the claim text.