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US 12,749,665 B2Granted
Sputtering apparatus
AssigneeSamsung Display Co., Ltd.
InventorsGi Woon Sung, Myung Soo Huh, Nam Wook Kang, Jin Soo Park, Sung Kyu Yang, Doo Seon Yu, You Jong Lee, Jeong Il Lee
Life of this patent
Estimating the term…
Abstract
A sputtering apparatus includes: a chamber; a target disposed inside the chamber; a coil disposed adjacent to the target; a moving member on which the coil is disposed, where the moving member adjusts a position of the coil; and a coil shield disposed inside the chamber to overlap the coil. An opening is defined in the coil shield.
Claims19
A sputtering apparatus comprising:
- a chamber;
- a target disposed inside the chamber;
- a coil disposed adjacent to the target;
- a moving member on which the coil is disposed, wherein the moving member adjusts a position of the coil in a first direction which is a direction perpendicular to a plane on which the coil is disposed;
- and
- a coil shield disposed inside the chamber to overlap the coil,
- wherein a plurality of openings is defined in the coil shield through a top surface of the coil shield,
- wherein the coil shield is movable in a second direction extending along the plane and intersecting the first direction, and
- wherein an opening ratio of each of the plurality of openings is adjusted when the coil shield moves.
6 more elements
A sputtering apparatus comprising:
- a chamber;
- a target disposed inside the chamber;
- a coil disposed adjacent to the target;
- and
- a coil shield disposed inside the chamber to overlap the coil,
- wherein the coil shield includes a first coil shield and a second coil shield disposed on the first coil shield,
- wherein the first coil shield and the second coil shield are in contact with each other, and one of the first coil shield and the second coil shield is slidably moveable in a direction in which a plane on which the coil is disposed extends with respect to the other of the first coil shield and the second coil shield,
- wherein a plurality of openings is defined in the coil shield through a top surface of the coil shield, and
- wherein an opening ratio of each of the plurality of openings is adjusted when one of the first coil shield and the second coil shield slidably moves with respect to the other of the first coil shield and the second coil shield.
6 more elements
Dependencies are inferred from the claim text.