Substrate processing device and substrate processing method
AssigneeSemes Co., Ltd.
InventorsTae Sung Kim, Duk Hyun Son
Life of this patent
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Abstract
The substrate processing device includes a chamber in which a processing space for processing a substrate is formed, a substrate support unit supporting the substrate in the processing space, a gas supply portion supplying process gas to the processing space, a gas supply unit supplying gas to the gas supply portion, and a controller connected to the gas supply unit, wherein the gas supply unit includes a flow control valve controlling a flow rate of the process gas supplied through a gas supply line, and the controller controls, during a first time, the flow control valve to alternately provide supply of a flow rate greater than an average flow rate for the first time and supply of a flow rate less than the average flow rate.
Claims8
A substrate processing method comprising:
- a gas supply operation of supplying process gas to a processing space through one or more gas supply lines;
- a plasma forming operation of forming plasma in the processing space;
- and
- an operation of exhausting an inside of the processing space,
- wherein the gas supply operation includes:
- a first gas supply operation of supplying a flow rate less than an average flow rate for a first time, during the first time in which the process gas is supplied through at least one of the gas supply lines, and a second gas supply operation of supplying a flow rate greater than the average flow rate, and
- the first gas supply operation and the second gas supply operation are performed alternately,
- wherein the gas supply line includes a first gas supply line providing gas to a center portion of the substrate and a second gas supply line providing gas to an edge portion of the substrate, and
- wherein the first gas supply line and the second gas supply line supply process gas to respectively different periodic waveform profiles including sinusoidal waveforms.
Dependencies are inferred from the claim text.