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US 12,749,652 B2Granted
Pulse-mode control in a bias supply
AssigneeAdvanced Energy Industries, Inc.
InventorFaleh Alskran
Life of this patent
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Abstract
Bias supplies and bias control methods are disclosed. One method comprises applying, during an ON pulse, a waveform using switching in connection with a DC voltage, removing the DC voltage while circulating current during an OFF pulse, reapplying the DC voltage, in advance of another ON pulse, and initiating the switching after reapplying the DC voltage to reapply the waveform during another ON pulse.
Claims19
A bias supply to produce a waveform, the apparatus comprising:
- a switch in a current path that couples a first node to a second node;
- a DC power supply coupled to the current path;
- and
- a controller comprising:
- bias control logic configured to, while the DC power supply is applying power, repeatedly close and open the switch to produce peak voltages and portions between the peak voltages;
- and
- pulse-mode control logic configured to:
- remove a DC voltage from the DC power supply;
- and
- while the power supply is not applying the DC voltage, close the at least one switch to circulate current through the switch and the DC power supply.
7 more elements
A method for producing a waveform comprising:
- applying, during an ON pulse, a waveform using switching of at least one a switch in connection with a DC voltage;
- removing the DC voltage and closing the at least one switch to circulate current during an OFF pulse;
- reapplying, in advance of another ON pulse, the DC voltage;
- and
- initiating the switching after reapplying the DC voltage to reapply the waveform during another ON pulse.
2 more elements
A system, the system comprising:
- a source generator configured to apply pulsed power to a plasma chamber;
- and
- a bias supply configured to:
- apply, during an ON pulse of the source generator, a waveform using switching in connection with a DC voltage;
- removing the DC voltage while circulating current during an OFF pulse of the source generator;
- reapply, in advance of another ON pulse, the DC voltage;
- and
- initiating the switching after reapplying the DC voltage to reapply the waveform during the other ON pulse.
5 more elements
Dependencies are inferred from the claim text.