Semiconductor reaction chamber

A semiconductor reaction chamber comprising:

• a chamber body, a dielectric window arranged at a top of the chamber body;
• a gas inlet member arranged at a center position of the dielectric window and configured to introduce a process gas into the chamber body;
• a carrier arranged inside the chamber body and configured to carry a to-be-processed wafer;
• an upper radio frequency assembly arranged above the chamber body and configured to ionize the process gas introduced into the chamber body to generate a plasma and first ultraviolet light;
• and a plurality of ultraviolet light generation devices arranged between the dielectric window and the carrier and around the gas inlet member and configured to generate second ultraviolet light radiating toward the carrier, the plurality of ultraviolet light generation devices being arranged at intervals along a circumference of the chamber body, wherein the second ultraviolet light in conjunction with the first ultraviolet light causes overall ultraviolet light radiation toward the to-be-processed wafer carried by the carrier to be uniformly distributed on a surface of the to-be-processed wafer;
• a support ring body arranged between the chamber body and the dielectric window and including a plurality of mounting holes passing through the support ring body and communicating with inside of the chamber body, the ultraviolet light generation devices being arranged correspondingly in the plurality of mounting holes, wherein an axis of each of the plurality of mounting holes forms a predetermined angle with a lower surface of the dielectric window, the predetermined angle being equal to a first predetermined angle between a radiation direction of a corresponding ultraviolet light generation device of the plurality of ultraviolet light generation devices and the lower surface of the dielectric window;
• wherein an ultraviolet light generation device of the plurality of ultraviolet light generation devices include:
• a cover body including:
• a mounting section arranged in one mounting hole of the plurality of mounting holes;
• and a light-emitting section connected to the mounting section, extending out from the mounting hole into the chamber body, and being transparent;
• a light-emitting member arranged in the cover body and configured to generate the second ultraviolet light;
• and an electrical connector electrically connected to the light-emitting member and a power supply device to transmit power of the power supply device to the light-emitting member.