3D memory block having low-resistance source/drain buried layer stacked architecture
AssigneeWuhan Xinxin Semiconductor Manufacturing Co., Ltd.
InventorKaiwei Cao
Life of this patent
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Abstract
The present disclosure provides a memory block, a memory cell, and a manufacturing method of a memory block. The memory block includes a memory array, including: a plurality of columns of semiconductor stacked strip structures that are spaced apart along a row direction; wherein each column of stacked strip structure extends along a column direction and comprises at least one drain region semiconductor strip, at least one channel semiconductor strip, and at least one source region semiconductor strip that are stacked along a height direction. Each drain region semiconductor strip and/or each source region semiconductor strip in each column of semiconductor stacked strip structure comprises a low-resistance conductive structure.
Claims9
A memory block, comprising:
- a memory array, comprising:
- a plurality of columns of semiconductor stacked strip structures that are spaced apart along a row direction;
- wherein each column of stacked strip structure extends along a column direction and comprises at least one drain region semiconductor strip, at least one channel semiconductor strip, and at least one source region semiconductor strip that are stacked along a height direction;
- each drain region semiconductor strip and/or each source region semiconductor strip in each column of semiconductor stacked strip structure comprises a low-resistance conductive structure;
- each column of semiconductor stacked strip structure at a non-edge position comprises a first semiconductor substructure, a second semiconductor substructure, and an insulating isolation structure arranged between the first semiconductor substructure and the second semiconductor substructure;
- each drain region semiconductor strip in the column of semiconductor stacked strip structure at the non-edge position is divided into a first drain region semiconductor sub-strip and a second drain region semiconductor sub-strip;
- each channel semiconductor strip in the column of semiconductor stacked strip structure at the non-edge position is divided into a first channel semiconductor sub-strip and a second channel semiconductor sub-strip;
- each source region semiconductor strip in the column of semiconductor stacked strip structure at the non-edge position is divided into a first source region semiconductor sub-strip and a second source region semiconductor sub-strip;
- and
- each of the first drain region semiconductor sub-strip and the second drain region semiconductor sub-strip comprises a first drain region semiconductor layer structure, a second drain region semiconductor layer structure, and a third drain region semiconductor layer structure;
- the second drain region semiconductor layer structure is arranged between the first drain region semiconductor layer structure and the third drain region semiconductor layer structure;
- the first drain region semiconductor layer structure and the third drain region semiconductor layer structure are each of a silicon semiconductor layer structure, and the second drain region semiconductor layer structure is of a silicon germanium semiconductor layer structure;
- and/or
- each of the first source region semiconductor sub-strip and the second source region semiconductor sub-strip comprises a first source region semiconductor layer structure, a second source region semiconductor layer structure, and a third source region semiconductor layer structure;
- the second source region semiconductor layer structure is arranged between the first source region semiconductor layer structure and the third source region semiconductor layer structure;
- the first source region semiconductor layer structure and the third source region semiconductor layer structure are each of a silicon semiconductor layer structure, and the second source region semiconductor layer structure is of a silicon germanium semiconductor layer structure.
Dependencies are inferred from the claim text.