Valve assembly and system used to control flow rate of a fluid

A mass flow meter comprising:

• a flow pathway through the mass flow meter, wherein the flow pathway comprises a first cavity and a second cavity,
• a laminar flow element adjacent to the first cavity and the second cavity, wherein the first cavity is upstream of the laminar flow element and the second cavity is downstream of the laminar flow element, wherein the laminar flow element produces full scale flow at a predetermined upper pressure;
• a pressure transducer positioned in at least one of the first cavity or the second cavity, wherein the pressure transducer includes at least one diaphragm and wherein the pressure transducer measures responses of the at least one diaphragm to a first pressure to determine a voltage signal indicative of a pressure, the pressure transducer configured to measure responses within a first predetermined pressure range in which linear characteristics of the pressure transducer dominate over non-linear characteristics of the pressure transducer and configured to measure responses within a second predetermined pressure range in which the non-linear characteristics of the pressure transducer are sufficiently significant compared to the linear characteristics, the second predetermined pressure range having an upper limit at the predetermined upper pressure;
• and
• convert the pressure reading obtained from the pressure transducer into a signal indicative of a mass flow rate through the laminar flow element.