Part, sensor, and metrology data integration

A system comprising:

• a memory;
• and
• a processor, coupled to the memory, to:
• identify a plurality of sets of part data associated with a plurality of equipment parts of substrate processing equipment, wherein each of the plurality of sets of part data comprises corresponding part values and a corresponding part identifier, and wherein each of the plurality of sets of part data is associated with part storage data, part transportation data, or part installation data of a corresponding equipment part of the substrate processing equipment;
• generate a plurality of sets of aggregated data, each of the plurality of sets of aggregated data comprising a corresponding set of part data of the plurality of sets of part data and a corresponding set of additional non-part data of a plurality of sets of non-part data, wherein to generate the plurality of sets of aggregated data, the processor is to:
• determine common portions between the plurality of sets of part data and the plurality of sets of additional non-part data;
• and
• for each of the common portions, generate a corresponding set of aggregated data to generate the plurality of sets of aggregated data;
• and
• cause, based on the plurality of sets of aggregated data, performance of a corrective action associated with adjusting one or more of at least one part manufacturing operation or at least one substrate processing operation associated with the substrate processing equipment.

A non-transitory computer readable medium having instructions stored thereon, which, when executed by a processing device, cause the processing device to:

• identify a plurality of sets of part data associated with a plurality of equipment parts of substrate processing equipment, wherein each of the plurality of sets of part data comprises corresponding part values and a corresponding part identifier, and wherein each of the plurality of sets of part data is associated with part storage data, part transportation data, or part installation data of a corresponding equipment part of the substrate processing equipment;
• generate a plurality of sets of aggregated data, each of the plurality of sets of aggregated data comprising a corresponding set of part data of the plurality of sets of part data and a corresponding set of additional non-part data of a plurality of sets of non-part data, wherein to generate the plurality of sets of aggregated data, the processing device is to:
• determine common portions between the plurality of sets of part data and the plurality of sets of additional non-part data;
• and
• for each of the common portions, generate a corresponding set of aggregated data to generate the plurality of sets of aggregated data;
• and
• cause, based on the plurality of sets of aggregated data, performance of a corrective action associated with adjusting one or more of at least one part manufacturing operation or at least one substrate processing operation associated with the substrate processing equipment.