Digital exposure system

A digital exposure system comprising:

• a light source that radiates light onto a substrate;
• a digital mirror device that forms a two-dimensional pattern image by selectively transmitting light emitted from the light source;
• an optical system that modulates the two-dimensional pattern image into a one-dimensional pattern image;
• and
• a substrate scanner that adjusts the position of the substrate to continuously project the one-dimensional pattern image onto a photosensitive layer on the substrate for scan exposure,
• wherein the two-dimensional pattern image has a uniform image in a direction parallel with a scan direction for the substrate and has an image of a target pattern in a direction perpendicular to the scan direction for the substrate,
• wherein the digital mirror device includes a plurality of pixel mirrors which rotates on a pixel rotation axis, and
• wherein a focusing direction in which the two-dimensional pattern image is focused and the pixel rotation axis are parallel with each other.

A digital exposure system comprising:

• a light source that radiates light onto a substrate;
• a digital mirror device that forms a two-dimensional pattern image by selectively transmitting light emitted from the light source;
• an optical system that modulates the two-dimensional pattern image into a one-dimensional pattern image;
• and
• a substrate scanner that adjusts the position of the substrate to continuously project the one-dimensional pattern image onto a photosensitive layer on the substrate for scan exposure,
• wherein the two-dimensional pattern image has a uniform image in a direction parallel with a scan direction for the substrate and has an image of a target pattern in a direction perpendicular to the scan direction for the substrate,
• wherein the digital mirror device includes a plurality of pixel mirrors which rotates on a pixel rotation axis, and
• wherein an inclination angle between a focusing direction in which the two-dimensional pattern image is focused and the pixel rotation axis is larger than 0° and smaller than 45°.