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US 12,748,325 B1Granted
Electro-optic device containing ferroelectric layer and integrated heaters and method of fabrication thereof
AssigneePsiquantum, Corp.
InventorsKoen Alexander, Chia-Ming Chang, Gary Gibson, Hung-Hsi Lin, John Elliott Ortmann, Jr.
Life of this patent
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Abstract
A method includes electrostatically poling a ferroelectric electro-optic (“EO”) layer and heating the ferroelectric EO layer to a temperature of at least 50 degrees Celsius during the electrostatically poling the ferroelectric EO layer.
Claims16
A method, comprising:
- electrostatically poling a ferroelectric electro-optic (“EO”) layer of an interferometer;
- and
- heating the ferroelectric EO layer to a temperature of at least 50 degrees Celsius during the electrostatically poling the ferroelectric EO layer.
A method, comprising:
- electrostatically poling a ferroelectric electro-optic (“EO”) layer;
- heating the ferroelectric EO layer to a temperature of at least 50 degrees Celsius during the electrostatically poling the ferroelectric EO layer;
- operating an EO device containing the ferroelectric EO layer;
- determining a polarization state of the ferroelectric EO layer;
- and
- if the ferroelectric EO layer is determined to have sufficient polarization then continue to operate the ferroelectric EO layer, and
- if the ferroelectric layer is determined to have insufficient polarization then re-pole the ferroelectric EO layer while applying heat.
4 more elements
Dependencies are inferred from the claim text.