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US 12,748,300 B2Granted
Optical module, electronic device, and driving method
AssigneeSeiko Epson Corporation
InventorsTomonori Matsushita, Nozomu Hirokubo
Life of this patent
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Abstract
An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.
Claims10
An optical module comprising:
- a first reflective film that transmits a first portion of incident light and reflects a second portion of the incident light;
- a second reflective film, disposed so as to face the first reflective film, that reflects a third portion of the incident light and transmits a fourth portion of the incident light;
- and
- a gap controller that changes a size of a gap between the first reflective film and the second reflective film,
- wherein the gap controller controls the size of the gap in correspondence with a wavelength to be measured based on an order of a transmission spectrum which is set with respect to each of two or more wavelength region groups constituting a wavelength region to be measured,
- wherein a measurement wavelength region includes a first wavelength region and a second wavelength region having a longer wavelength than that of the first wavelength region,
- the wavelength to be measured includes a lower-order peak wavelength and a higher-order peak wavelength, and the wavelength to be measured is transmitted using the higher-order peak wavelength to thereby enable the gap between the reflective films to be increased in comparison to where the wavelength to be measured is transmitted using the lower-order peak wavelength,
- wherein m and n are different natural numbers, and m=n+1,
- wherein light of the wavelength to be measured in the first wavelength region is transmitted using an m-th peak wavelength as the higher-order peak wavelength, and light of a wavelength to be measured in the second wavelength region is transmitted using an n-th peak wavelength as the lower-order peak wavelength,
- wherein the gap controller controls the size of the gap using an m-th peak wavelength for light of the first wavelength region, and controls the size of the gap using an n-th peak wavelength for light of the second wavelength region, and
- wherein the gap for extracting light having a shortest wavelength in the second wavelength region is larger than the gap for extracting light having a longest wavelength in the first wavelength region.
8 more elements
Dependencies are inferred from the claim text.