Silicon-based optical component and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei Liang, Chen-Hua Yu, Jiun-Yi Wu, Nien-Fang Wu
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Abstract
An optical component is provided. The optical component includes a silicon-based body including a bottom wall, a first side wall, a second side wall, and a micro lens structure. The first side wall is located on a first side of the silicon-based body and perpendicular to the bottom wall. The second side wall is located on a second side of the silicon-based body opposite to the first side, and forms an acute angle with the bottom wall. The micro lens structure is formed on the first side wall. The optical component further includes a protection layer formed over the first side wall and the micro lens structure.
Claims20
An optical component, comprising:
- a silicon-based body, comprising:
- a bottom wall;
- a first side wall located on a first side of the silicon-based body and perpendicular to the bottom wall;
- a second side wall located on a second side of the silicon-based body opposite to the first side and forming an acute angle with the bottom wall;
- and
- a micro lens structure formed on the first side wall;
- and
- a protection layer formed over the first side wall and the micro lens structure,
- wherein in a direction parallel to the first side wall, a width of the protection layer is equal to a width of the first side wall.
An optical component, comprising:
- a silicon-based body, comprising:
- a bottom wall;
- a first side wall located on a first side of the silicon-based body and perpendicular to the bottom wall;
- a second side wall located on a second side of the silicon-based body opposite to the first side and forming an acute angle with the bottom wall;
- a top wall connecting the first side wall and the second side wall, wherein the top wall is parallel to the bottom wall;
- and
- a micro lens structure formed on the first side wall;
- and
- a dielectric layer formed over the first side wall and the micro lens structure, wherein the micro lens structure is embedded within the dielectric layer, and the dielectric layer has a planar surface that is parallel to the first side wall, and
- wherein the dielectric layer further has a first side surface and a second side surface located on opposite sides of the planar surface, the first side surface is flush with the top wall of the silicon-based body, and the second side surface is flush with the bottom wall of the silicon-based body.
An optical component, comprising:
- a silicon-based body, comprising:
- a bottom wall;
- a top wall opposite to the bottom wall;
- a first side wall located on a first side of the silicon-based body and perpendicular to the bottom wall and the top wall, wherein the first side wall connects the top wall and the bottom wall;
- a second side wall located on a second side of the silicon-based body opposite to the first side and forming an acute angle with the bottom wall;
- and
- a micro lens structure formed on the first side wall;
- and
- a protection layer formed over the first side wall and the micro lens structure,
- wherein in a direction parallel to the first side wall, a width of the protection layer is equal to a width of the first side wall.
Dependencies are inferred from the claim text.