Optical filters with hydrogenated silicon carbide and systems and methods of making the same

A method of making an optical filter, the method comprising:

• arranging a substrate within a chamber of a sputtering system;
• forming an interference filter on a first aide of the substrate;
• and
• providing an anti-reflective coating on a second side of the substrate;
• wherein the forming the interference filter comprises alternatingly forming first material layers and forming second material layers stacked on a first side of the substrate;
• wherein forming one or more of the second material layers includes:
• introducing one or more gases into the chamber;
• orienting one or more silicon sputtering targets toward the substrate;
• and
• activating the sputtering system to deposit a respective second material layer of hydrogenated silicon carbide (SiC:H) material onto a first side of previously deposited first material layer of the first material layers such that the respective second material layer contacts the previously deposited first material layer;
• and
• wherein forming one or more of the first material layers includes depositing a respective first material layer onto a first side of a previously deposited second material layer such that the respective first material layer contacts the previously deposited second material layer.

An optical filter comprising:

• a substrate comprising a first side and a second side opposite the first side;
• a first layer of a first material on the first side of a substrate, wherein the first layer comprises a first side and a second side opposite the first side;
• and
• a second layer of a second material on the first layer, wherein the second layer comprises a first side and a second side opposite the first side, and wherein the second side of the second layer contacts the first side of the first layer;
• a third layer of the first material on the second layer, wherein the third layer comprises a first side and a second side opposite the first side, and wherein the second side of the third layer contacts the first side of the second layer;
• and
• an anti-reflective coating on the second side of the substrate:
• wherein the second material is a hydrogenated silicon carbide (SiC:H) material;
• and
• wherein the first material layer has a first refractive index, and the second material layer with a second refractive index greater than the first refractive index.