Multi-film resistive gas sensor and system
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Akimoto, Akira Fujimoto, Yoshihiko Kurui, Ping Wang
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AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Akimoto, Akira Fujimoto, Yoshihiko Kurui, Ping Wang
Estimating the term…
According to one embodiment, a sensor includes an element section. The element section includes a base including a first region, a second region and a third region, a first element fixed to the first region, a second element fixed to the second region, and a third element fixed to the third region. The first element includes a first fixed portion fixed to the first region, and a first film portion supported by the first fixed portion. The first film portion includes a first resistance member and a first layer including a first material. The second element includes a second fixed portion fixed to the second region, and a second film portion supported by the second fixed portion. The third element includes a third fixed portion fixed to the third region, and a third film portion supported by the third fixed portion.
A sensor, comprising:
Dependencies are inferred from the claim text.