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US 12,748,049 B2Granted
Plasmonic device
AssigneeOstia Technologies Limited
InventorKa Wai Wong
Life of this patent
Estimating the term…
Abstract
A plasmonic substrate fabrication method is formed using sacrificial nanostructures or microstructures of removable materials printed onto a substrate, and subsequent deposition or growth of a material such as metal or graphene. After the sacrificial structures are removed, plasmonic hotspots of nanoscale or microscale dimension and geometry are obtained on the substrate, enabling various sensing and detection of analytes based on plasmonic techniques.
Claims25
A method of fabricating a plasmonic device comprising:
- fabricating a plurality of structures that are nanostructures or microstructures having a feature size of from 1 to 1000 nm on a substrate, at least two structures of the plurality of structures contacting each other at a contact region;
- forming a layer of a plasmonic material on the substrate;
- and
- removing the plurality of structures to form a pattern having first and second plasmonic material portions spaced apart from each other and having a gap therebetween of less than 100 nm, so as to produce the plasmonic device having a plasmonic hotspot at said gap,
- wherein the gap corresponds to the contact region between the at least two structures.
2 more elements
A method of fabricating a plasmonic device comprising:
- fabricating a plurality of structures on a substrate, each of the plurality of structures having a feature size from 1 to 1000 nm, and two structures of the plurality of structures contacting each other at a contact region;
- forming a layer of a plasmonic material on the substrate;
- and
- removing the plurality of structures to form a pattern having first and second plasmonic material portions spaced apart from each other across a gap corresponding to the contact region, so as to produce the plasmonic device having a plasmonic hotspot at the gap,
- wherein a gap distance corresponding to the gap is within a range of 10 nm to 85 nm, and
- wherein each of the plurality of structures is a nanostructure or a microstructure.
3 more elements
Dependencies are inferred from the claim text.