MEMS gyroscope with enhanced robustness against vibrations and reduced dimensions

A gyroscope, comprising:

• a support;
• a first drive assembly elastically coupled to the support, the first drive assembly including a first frame including a base and first and second arms extending from the base of the first frame;
• a first mass positioned between the first and second arms of the first frame, the first mass elastically coupled to the first arm of the first frame by a first spring and to the second arm of the first frame by a second spring, the first mass configured to move with respect to the support along a first drive direction and along a first sense direction that is transverse to the first drive direction;
• a second drive assembly elastically coupled to the support, the second drive assembly including a second frame including a base and first and second arms extending from the base of the second frame;
• a second mass positioned between the first and second arms of the second frame, the second mass elastically coupled to the first arm of the second frame by a third spring and to the second arm of the second frame by a fourth spring, the second mass configured to move with respect to the support in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction, the first arm of the first frame elastically coupled to the first arm of the second frame by a fifth spring, the second arm of the first frame elastically coupled to the second arm of the second frame by a sixth spring;
• and
• a sense mass elastically coupled to the support and elastically coupled between the first mass and the second mass.

A gyroscope, comprising:

• a fixed structure;
• a first movable mass configured to move along a first drive direction and along a first sense direction, transverse to the first drive direction;
• a first drive assembly elastically coupled to the fixed structure and the first movable mass, the first drive assembly configured to generate a first alternate drive movement in the first drive direction, the first drive assembly including a first frame including a base and first and second arms extending from the base of the first frame, the first movable mass elastically coupled to the first arm of the first frame by a first spring and to the second arm of the first frame by a second spring;
• a second movable mass configured to move in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction;
• a second drive assembly elastically coupled to the fixed structure and the second movable mass, the second drive assembly configured to generate a second alternate drive movement in the second drive direction, the second drive assembly including a second frame including a base and first and second arms extending from the base of the second frame, the second movable mass elastically coupled to the first arm of the second frame by a third spring and to the second arm of the second frame by a fourth spring, the first arm of the first frame elastically coupled to the first arm of the second frame by a fifth spring, the second arm of the first frame elastically coupled to the second arm of the second frame by a sixth spring;
• and
• a sense mass elastically coupled to the fixed structure, the first movable mass, and the second movable mass, the first movable mass being coupled to the second movable mass by the sense mass.