Shut-off valve, vacuum pump system, and vacuum pump
AssigneeShimadzu Corporation
InventorsHiroaki Kimura, Masahito Kogame
Life of this patent
Estimating the term…
Abstract
A shut-off valve 1 is a shut-off valve arranged on the downstream side with respect to an exhaust port of a vacuum pump, and includes a valve seat, a valve element, and a pressure receiving portion. The valve element is arranged on the downstream side with respect to the valve seat, and is configured movable so as to contact the valve seat or separate from the valve seat. The pressure receiving portion is arranged on the downstream side with respect to the valve element, and is movable to the valve seat by receiving the pressure of gas flowing back to the valve seat. The valve element is connected to the pressure receiving portion, and moves to the valve seat along with movement of the pressure receiving portion to the valve seat.
Claims7
A shut-off valve arranged on a downstream side with respect to an exhaust port of a vacuum pump, comprising:
- a valve seat;
- a valve element arranged on the downstream side with respect to the valve seat and configured movable so as to contact the valve seat or separate from the valve seat;
- a pressure receiving portion arranged on the downstream side with respect to the valve element and configured movable to the valve seat by receiving a pressure of gas flowing back to the valve seat;
- a valve element support member which extends to the downstream side from the valve element and to which the pressure receiving portion is fixed;
- and
- a support portion slidably supporting the valve element support member,
- wherein the pressure receiving portion is arranged on the downstream side of the valve element support member,
- the valve element is connected to the pressure receiving portion, and moves to the valve seat along with movement of the pressure receiving portion, and
- when the pressure receiving portion receives a pressure of atmospheric air when the atmospheric air entry occurs, the atmospheric air does not reach the valve element, but the valve element also starts moving along with movement of the pressure receiving portion,
- when the valve element contacts with the valve seat and when the valve element is separated from the valve seat, the pressure receiving portion is arranged on the downstream side of a most downstream portion of the support portion
- the valve element support member penetrates the support portion, and
- the valve element is arranged on an upstream side of the support portion.
Dependencies are inferred from the claim text.