Micromembrane pumping device

A micromembrane pumping device for pumping a fluid, comprising:

• a pump chamber to which an inlet valve for introducing the fluid into the pump chamber, an outlet valve for discharging the fluid from the pump chamber, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device comprises a plate-shaped actuator for deforming the membrane device;
• and
• an influencer for influencing the plate-shaped actuator so as to influence the volume of the pump chamber;
• wherein the membrane device comprises a plate-shaped membrane body limiting the pump chamber;
• wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber;
• wherein the plate-shaped actuator is mounted to the plate-shaped membrane body by means of an electrically insulating glue layer so that the plate-shaped actuator is electrically insulated from the membrane body;
• wherein at least one embedded portion of a support body at which or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the electrically insulating glue layer in order to detect the volume of the pump chamber;
• wherein the influencer, the plate-shaped actuator and the deformation sensor form a closed-loop control circuit for regulating a ratio between a change in volume of the pump chamber during an operating cycle of the micromembrane pumping device and a duration of the operating cycle of the micromembrane pumping device;
• wherein the embedded portion of the support body comprises at least one through hole which extends from a side of the embedded portion of the support body, facing the plate-shaped actuator, to a side of the embedded portion of the support body, facing the plate-shaped membrane body.