Acoustic element and acoustic element integrated circuit
AssigneeSilicon & System Co., Limited
InventorsYoshitaka Tadaki, Shin-ichiro Umemura, Kaoru Ogaya
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AssigneeSilicon & System Co., Limited
InventorsYoshitaka Tadaki, Shin-ichiro Umemura, Kaoru Ogaya
Estimating the term…
This acoustic element includes: a first electrode base (12); a second electrode base (11) facing the first electrode base; first electrode-side protrusions (12aq−1, 12aq, 12aq+1, . . . ) provided on the first electrode base and having a first stepped side wall inclined at an angle of 45° or less with respect to a vibration direction; and second-electrode-side protrusions (11ap−1, 11ap, 11ap+1, . . . ) provided on the second electrode base and facing the first electrode-side protrusions so as to at least partially intersect, and having a second stepped The voltage applied between the first electrode base and the second The voltage applied between the first electrode base and the second electrode base causes the first electrode base or the second electrode base to vibrate in the vibration direction.
An acoustic device, comprising:
An acoustic device integrated circuit in which a plurality of cells in which a plurality of capacitive acoustic device are each distributed by a number of units are arranged in two dimensions on the same curved surface, wherein each of the plurality of cells distributed by a specific number of units is a transmission cell comprising:
Dependencies are inferred from the claim text.