Feeding apparatus and substrate processing device

A feeding apparatus, characterized in that the feeding apparatus is configured to supply a material for a coating process of a substrate so that the substrate coated with the material becomes an electrode plate;

• and the feeding apparatus comprises:
• a material conveying channel, wherein the material conveying channel comprises a feeding inlet and a discharging outlet, the feeding inlet is closer to a first end of the material conveying channel than the discharging outlet, and the discharging outlet is closer to a second end of the material conveying channel than the feeding inlet, the first end and the second end being two opposite ends of the material conveying channel;
• a vibration generator disposed at the material conveying channel, wherein the vibration generator is configured to generate mechanical vibration to induce the mechanical vibration of the feeding apparatus, and the material entering the material conveying channel through the feeding inlet is conveyed to the discharging outlet under action of the mechanical vibration and falls out of the feeding apparatus through the discharging outlet under the action of gravity,
• a hopper, wherein an outlet of the hopper is connected to the feeding inlet so that the material is added to the material conveying channel through the hopper;
• and
• a baffle plate, wherein a thickness direction of the baffle plate is perpendicular to the direction of gravity, the baffle plate is disposed in a region around the discharging outlet of the material conveying channel, and the baffle plate is configured to block the material falling through the discharging outlet,
• wherein an included angle between an amplitude direction of the mechanical vibration and the direction of gravity and an included angle between the amplitude direction of the mechanical vibration and a forward horizontal direction from the feeding inlet to the discharging outlet are both acute angles, wherein the forward horizontal direction is perpendicular to the direction of gravity.