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US 12,745,932 B1Granted
Methods of manufacturing electrochemical sensors
AssigneeWillow Laboratories, Inc.
InventorsMassi Joe E. Kiani, Hung The Vo, Kevin Hughes Pauley, Venkatramanan Krishnamani
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Abstract
An electrode system for an electrochemical sensor, such as a glucose sensor, is disclosed. The electrode system may include a working electrode, a reference electrode, and a counter electrode. The working electrode may comprise two layers of different metals, such as gold and platinum. A method for forming such an electrode system is disclosed.
Claims19
A method of manufacturing an electrochemical sensor, the method comprising:
- fabricating a first layer comprising a working electrode and a reference electrode, the fabricating the first layer further comprising:
- providing a first substrate;
- forming a separation layer on the first substrate;
- forming a base layer on the separation layer;
- forming the reference electrode with e-beam evaporation processes;
- forming the working electrode with e-beam evaporation processes;
- forming a photoresist layer;
- patterning the photoresist layer;
- and
- removing the first substrate;
- fabricating a second layer comprising a counter electrode on a second substrate, the second layer separate from the first layer;
- and
- combining by stacking the first layer comprising the working electrode and the reference electrode with the second layer comprising the counter electrode.
10 more elements
A method of manufacturing an electrochemical sensor, the method comprising:
- fabricating a first layer comprising a working electrode and a reference electrode on a first substrate;
- fabricating a second layer comprising a counter electrode, the second layer separate from the first layer, the fabricating the second layer further comprising:
- providing a second substrate;
- forming a separation layer on the second substrate;
- forming a base layer on the separation layer;
- forming the counter electrode with e-beam evaporation processes;
- forming a photoresist layer on the formed counter electrode;
- patterning the photoresist layer;
- and
- removing the second substrate;
- and
- combining by stacking the first layer comprising the working electrode and the reference electrode with the second layer comprising the counter electrode.
9 more elements
Dependencies are inferred from the claim text.